发明名称 Nitride semiconductor thin film and method for growing the same
摘要 The present invention relates to a nitride semiconductor thin film and a method for growing the same. The present invention has an advantage in that a plurality of grooves are formed on a substrate by partially etching the substrate, and leg portions for preventing longitudinal growth of a nitride semiconductor are formed within the grooves so that the nitride semiconductor thin film is grown laterally to cover top portions of the leg portions, thereby ensuring growth of a high quality nitride semiconductor thin film.
申请公布号 US2005167686(A1) 申请公布日期 2005.08.04
申请号 US20050043055 申请日期 2005.01.27
申请人 LG ELECTRONICS INC. 发明人 SEO JUNG H.
分类号 C23C16/34;C30B25/18;C30B29/40;H01L21/20;H01L21/205;H01L21/36;H01L33/12;H01L33/32;H01S5/323;(IPC1-7):H01L29/22 主分类号 C23C16/34
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