发明名称 Deep trench isolation for power semiconductors
摘要 <p>An integrated power semiconductor device has an isolation structure having two or more isolation trenches (T1, T2...,), and one or more regions (202, 204) in between the isolation trenches, and a bias arrangement (V1, V2...,R1, R2...) coupled to the regions to divide a voltage across the isolation structure between the isolation trenches. By dividing the voltage, the reverse breakdown voltage characteristics such as voltage level, reliability and stability can be improved for a given area of device, or for a given complexity of device, and avalanche breakdown at weaknesses in isolation structures can be reduced or avoided.</p>
申请公布号 EP2006900(A1) 申请公布日期 2008.12.24
申请号 EP20070010439 申请日期 2007.05.25
申请人 AMI SEMICONDUCTOR BELGIUM BVBA 发明人 MOENS, PETER;DESOETE, BART
分类号 H01L21/762 主分类号 H01L21/762
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