| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator which is stably driven because the behavior of a movable plate is accurately detected, and effectively manufactured, and to provide an optical scanner furnished with the actuator and an image forming apparatus. SOLUTION: The actuator has a light reflection part 29 and a turnably provided second mass part 23, and scans an object with light reflected on the light reflection part 29 by turning the second mass part 23, and further has an optical sensor composed of a light emitting part 11 and a light receiving part connected to the supporting part 24 via a bonding film 15. The bonding film 15 includes an Si framework having a random atomic structure including siloxane binding and a leaving group bound to the Si framework before energy is given. Part of leaving group is detached from the Si framework by giving energy, instead active species is generated. Thus, adhesiveness is developed on the bonding film 15 and the supporting part 24 and the light emitting part 11 are bonded. COPYRIGHT: (C)2009,JPO&INPIT
|
