APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE

摘要

An apparatus for manufacturing a display device, the apparatus including a loading chamber configured to receive a substrate from outside, a transfer chamber connected to the loading chamber and including a robot arm configured to transport the substrate, a deposition chamber connected to the transfer chamber and configured to deposit a deposition material onto the substrate after the substrate is transported to the deposition chamber from the transfer chamber, a mask supply chamber connected to the deposition chamber and configured to supply, to the deposition chamber, one of a plurality of masks stacked in the mask supply chamber, and a station connected to the mask supply chamber and configured to supply the plurality of masks, one by one, to the mask supply chamber.

主权项

1. An apparatus for manufacturing a display device, the apparatus comprising:
a loading chamber configured to receive a substrate from outside; a transfer chamber connected to the loading chamber and comprising a robot arm configured to transport the substrate; a deposition chamber connected to the transfer chamber and configured to deposit a deposition material onto the substrate after the substrate is transported to the deposition chamber from the transfer chamber; a mask supply chamber connected to the deposition chamber and configured to supply, to the deposition chamber, one of a plurality of masks stacked in the mask supply chamber; and a station connected to the mask supply chamber and configured to supply the plurality of masks, one by one, to the mask supply chamber.