| 发明名称 |
APPARATUS AND METHOD FOR PRODUCING ALUMINUM NITRIDE POWDER AND ALUMINUM NITRIDE POWDER PREPARED THEREBY |
| 摘要 |
Disclosed herein are an apparatus and a method for producing aluminum nitride powder, and aluminum nitride powder prepared thereby. The apparatus for producing aluminum nitride powder includes: a vertical reactor including an aluminum source supplier for supplying aluminum source and a nitrogen source supplier for supplying nitrogen source, the vertical reactor causing chemical vapor reaction between the aluminum source and the nitrogen source supplied therein; a trap device including a membrane for passing resulting products from the reaction; and a bubbling device for capturing the products having passed through the trap device. |
| 申请公布号 |
US2016272497(A1) |
申请公布日期 |
2016.09.22 |
| 申请号 |
US201615074761 |
申请日期 |
2016.03.18 |
| 申请人 |
OCI COMPANY LTD. |
发明人 |
KOO Jae-Hong;CHUNG Yong-Kwon;KIM Shin-A;CHI Eun-Ok |
| 分类号 |
C01B21/072;B01J19/24 |
主分类号 |
C01B21/072 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for producing aluminum nitride powder comprising:
a vertical reactor including an aluminum source supplier for supplying aluminum source and a nitrogen source supplier for supplying nitrogen source, the vertical reactor causing chemical vapor reaction between the aluminum source and the nitrogen source supplied therein; a trap device including a membrane for passing resulting products from the reaction; and a bubbling device for capturing the products having passed through the trap device. |
| 地址 |
Seoul KR |
