| 摘要 |
The three-dimensional micro-mechanical component that is made of a base material provided with carbon (C) or silicon (Si), glass-ceramics or aluminum-containing glass-ceramics. A chamfer (41,42) is placed at specific angle in the edges of the surface.The chamfer has specific surface roughness. The base material composed of silicon, Silicon dioxide (SiO2), quartz, Silicon carbide (SiC), diamond, diamond-like carbon (DLC), or crystalline diamond made of sapphire or ruby. An independent claim is included for a method for producing a micromechanical component. |
