| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical boat for heat treatments which can prevent effectively the generations of slips on a wafer etc. during the heat treatments and can be manufactured comparably easily at a low material cost. SOLUTION: The vertical boat 10 has a top board 1, a bottom board 2, and support poles interposed fixedly between the boards 1, 2 wherein a plurality of grooves 8 are formed and support portions for supporting horizontally wafer-like processed bodies are formed between the respective grooves. Further, as the foregoing poles, there are formed in the form of a circular cylinder the respective sets 3, 4 of the two or more poles inside each set of which circular-arc-like support portions 6 are formed integrally with it by its circular-arc-like section and the formations of the foregoing grooves. The wafer-like processed bodies are so inserted into the grooves of the poles as to be supported along the peripheral edge portions of their rear surfaces by the respective arcuate supporting portions. COPYRIGHT: (C)2005,JPO&NCIPI |
