发明名称 |
LIQUID CRYSTAL DISPLAY DEVICE AND EL DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide sure contacts of electrodes in a semiconductor device. SOLUTION: The semiconductor device has a thin-film transistor (TFT), a dielectric film composed of a silicide film formed on the TFT and a resinous material formed on the dielectric film composed of the silicide film. Contact holes are formed in the dielectric film composed of the silicide film and the dielectric film composed of the resinous material. The openings of the contact holes formed in the dielectric film composed of the resinous material are wider than the openings of the contact holes formed in the dielectric film composed of the silicide film. COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2005049884(A) |
申请公布日期 |
2005.02.24 |
申请号 |
JP20040233978 |
申请日期 |
2004.08.11 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;FUKUNAGA KENJI;SUZAWA HIDEOMI;NAKAZAWA MISAKO |
分类号 |
G02F1/1368;G09F9/30;H01L21/336;H01L21/768;H01L23/522;H01L27/32;H01L29/786;H01L51/50;H05B33/14;(IPC1-7):G09F9/30;G02F1/136 |
主分类号 |
G02F1/1368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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