发明名称 LIQUID CRYSTAL DISPLAY DEVICE AND EL DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide sure contacts of electrodes in a semiconductor device. SOLUTION: The semiconductor device has a thin-film transistor (TFT), a dielectric film composed of a silicide film formed on the TFT and a resinous material formed on the dielectric film composed of the silicide film. Contact holes are formed in the dielectric film composed of the silicide film and the dielectric film composed of the resinous material. The openings of the contact holes formed in the dielectric film composed of the resinous material are wider than the openings of the contact holes formed in the dielectric film composed of the silicide film. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005049884(A) 申请公布日期 2005.02.24
申请号 JP20040233978 申请日期 2004.08.11
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;FUKUNAGA KENJI;SUZAWA HIDEOMI;NAKAZAWA MISAKO
分类号 G02F1/1368;G09F9/30;H01L21/336;H01L21/768;H01L23/522;H01L27/32;H01L29/786;H01L51/50;H05B33/14;(IPC1-7):G09F9/30;G02F1/136 主分类号 G02F1/1368
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