| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measurement device and a method of measuring a surface shape that appropriately evaluate a surface shape of a measurement object, and shorten a calculation time.SOLUTION: A surface shape measurement method comprises: a step S1 of decomposing a distance from a three-dimensional scanner to a surface of a measurement object into position data and height data; a step S2 of setting a reference plane on which a surface state is projected; a step S3 of splitting a surface projected on the reference plane into a measurement area of a preliminarily set size, and calculating the number of point groups of height data on each measurement area; a step S4 of calculating a distance projected on the reference plane between a center of each measurement area and the three-dimensional scanner; a step S5 of calculating the target number of point groups of height data on each measurement area in accordance with a distance to the three-dimensional scanner using a distance to the most distant measurement area from the three-dimensional scanner; a step S6 of performing thinning-out processing of the height data when the number of point groups of the height data is more than the target number of point groups; and a step S7 of evaluating a surface shape by a regression curve from point groups of the height data on each measurement area.SELECTED DRAWING: Figure 3 |
