A PHOTO IONIZER

摘要

This invention relates to a photo ionizer comprising multiple head units that generate soft X-ray in order to remove electric charges of a charged body and a control unit that controls the head units, wherein each of said head units comprises a high voltage generation unit receiving low voltage and raising it to high voltage; an X-ray tube receiving high voltage from said high voltage generation unit and emitting X-ray; a silicon cap formed at the backside of said X-ray tube and protecting said X-ray tube from vibration; a bulb generating electrons; an output window emitting X-ray generated when the electrons collide with a target; a protective case consisting of a D-shaped side unit and a ?-shaped cover unit; a flange unit thermally and electrically connected to said output window and fixed to the front end of said X-ray tube, and radiating the heat generated from said target outside of said X-ray tube by contacting with the front surface of said side unit of the protective case; and a flange reinforcing plate having a first through hole whose diameter is as large as the diameter of the periphery of said flange unit, wherein the X-ray generated at said X-ray tube is emitted outside of said protective case through said first through hole and a second through hole whose diameter is smaller than the diameter of said first through hole, and wherein said second through hole is formed on said front surface of the protective case.