| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator having the increased volume of a plasma generating region. <P>SOLUTION: The plasma generator 110 has a casing 11 made of a sintered body the material of which is alumina (Al<SB>2</SB>O<SB>3</SB>). The casing 11 has a slit-like gas inlet 11i and a plurality of cylindrical gas outlets 11o. The width of the slit (in front and rear directions in Fig. 2. A and in left and right directions in Fig. 2. B) is set at 1 mm from the gas inlet 11i to the region right above the plasmatized region P, and the gas outlets 11o having inner diameters ranging from 1 to 2 mm are linearly formed in the longitudinal direction of the plasmatized region P. The cross section of the plasmatized P is made to have a square with a side of 2 to 5 mm. Recesses (hollows) are provided on mutually opposed surfaces of electrodes 2a, 2b. The commercial AC voltage 100 V (60 Hz) is stepped up to about 9 kV and the voltage is applied between the electrodes 2a, 2b with a current of 20 mA, and when argon is introduced through the gas inlet 11i, plasmatization is confirmed even if the electrodes 2a, 2b are separated up to 4 cm. <P>COPYRIGHT: (C)2009,JPO&INPIT |
