| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composition capable satisfying both of surface curability and curing depth, in particular, a resist composition. <P>SOLUTION: The composition is characterized in that, per 25 μm thickness of a dry film before exposure, an absorbance L<SB>400</SB>at 400 nm laser wavelength is 0.5-1.2, an absorbance L<SB>410</SB>at 410 nm laser wavelength is 0.01-0.5, and L<SB>400</SB>>L<SB>410</SB>is satisfied. <P>COPYRIGHT: (C)2009,JPO&INPIT |
