| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress increase in image recording time caused by a magnification process and degradation in picture quality of the image to minimum. <P>SOLUTION: In a digital exposure system 2, an electronic magnification process for correcting deviation in recording position of a drawing pattern caused by deviation from a reference size of a drawn object 14 is executed separately in two steps: a reference magnification process part 76 and an adjustment magnification process part 72. The reference magnification process part 76 achieves its function using a software, and applies the electronic magnification process to raster data at a reference magnification rate that is set based on the average value of deviation amount from the reference size of the drawn object 14, as an external setup operation which is done before exposure of the drawn object 14. The function of the adjustment magnification process part 72 is constructed using a hardware, and the electronic magnification process is applied according to the reference magnification rate and the adjustment magnification rate that are set based on the actual measurement size of the drawn object 14, as an internal setup operation during the period when the drawn object 14 is exposed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
