| 摘要 |
A substrate processing system includes: a main control unit, and a module controller. The main control unit has a configuration file in which ID information and detail information on devices for processing a substrate are recorded, wherein the detail information includes information needed for controlling the devices. The module controller has a list file obtained by converting the configuration file into a readable form. The module controller controls the devices described in the list file on the basis of commands from the main control unit. The module controller automatically adds, to the list file, ID information and detail information on a new device newly connected to the module controller to establish a condition under which the new device can be controlled. |
