| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device with improved productivity.SOLUTION: An imprint device performs imprint processing, in which an imprint material on a substrate is placed in contact with a mold to form patterns of the imprint material on the substrate, and includes: a detector for detecting the patterns of the imprint material which are formed on the substrate; and a control part which controls operation of the imprint device. The control part concurrently executes an imprint step, in which the patterns of the imprint material are formed on a substrate by the imprint processing, and a detection step, in which the patterns of the imprint material formed on a substrate different from the substrate, which is subject to the imprint processing, are detected by the detector.SELECTED DRAWING: Figure 4 |
