摘要 |
PROBLEM TO BE SOLVED: To easily manufacture a rotor disc for a rotor of a vacuum pump.SOLUTION: In a rotor disc (12) for a rotor of a vacuum pump, in particular, a turbo molecular pump (10), composed of a plurality of independent rotor discs (12) disposed while overlapped to each other on a rotor shaft (14) or an independent one rotor disc disposed on the rotor shaft (14), the rotor disc (12) has a plurality of blades (16) distributed in a circumferential direction. In the rotor disc (12), these blades respectively have a thickness profile transited from an inner side toward an outer side in a radial direction, and at least one blade (16) has the thickness profile having at least one stage (22) separating two parts (18, 20) of the blade (16).SELECTED DRAWING: Figure 1 |