DISPLACEMENT METER, POSITION DETECTING METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To enhance the accuracy of a position.SOLUTION: A displacement meter detects a position on a measurement surface. The displacement meter comprises a first detection unit for detecting a line formed on the same plane with or different plane from the measurement surface, and a second detection unit for detecting a position in the measurement surface. The plane has parallel lines, and a plurality of first detection units are arranged at intervals according to intervals between the parallel lines and detect the lines at the arranged positions. A detection result obtained from the first detection unit is output so as to correct a detection result obtained from the second detection unit.SELECTED DRAWING: Figure 7