| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow passage device having sufficient liquid tightness, and capable of being manufactured at low cost.SOLUTION: A flow passage device is constituted by laminating a flow passage substrate having a flow passage groove as a flow passage and a lid substrate covering the flow passage groove. The flow passage substrate has: an electric wiring pattern that is provided on a surface machined as the flow passage groove, and extends along the longitudinal direction of the flow passage; an open hole that has one opening on an opposite surface to the surface having the flow passage groove, and penetrates so as to communicate with the flow passage groove; and an electrode pad that is provided around the opening of the opposite surface. A drawing line electrically connecting the electrode pad and the electric wiring pattern is provided through the open hole.SELECTED DRAWING: Figure 1 |
