发明名称 |
Adaptive real time control of a reticle/mask system |
摘要 |
An adaptive real time thermal processing system is presented that includes a multivariable controller. Generally, the method includes creating a dynamic model of the thermal processing system; incorporating reticle/mask curvature in the dynamic model; coupling a diffusion-amplification model into the dynamic thermal model; creating a multivariable controller; parameterizing the nominal setpoints into a vector of intelligent setpoints; creating a process sensitivity matrix; creating intelligent setpoints using an efficient optimization method and process data; and establishing recipes that select appropriate models and setpoints during run-time.
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申请公布号 |
US2005167514(A1) |
申请公布日期 |
2005.08.04 |
申请号 |
US20040769623 |
申请日期 |
2004.01.30 |
申请人 |
KAUSHAL SANJEEV;PANDEY PRADEEP;SUGISHIMA KENJI |
发明人 |
KAUSHAL SANJEEV;PANDEY PRADEEP;SUGISHIMA KENJI |
分类号 |
F23N1/00;G03F;G03F1/14;G03F7/20;(IPC1-7):F23N1/00 |
主分类号 |
F23N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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