| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the problem that for electrostatic chuck equipment in which a metallic chuck-side terminal formed such that it projects from the backside of an electrostatic chuck is arranged inside an insulating member fixed to the inner peripheral surface of a through-hole formed on a metallic base member, when the chuck-side terminal is joined to a mating terminal such as a socket terminal, etc. on the side of a treatment apparatus, there occur a break and the like at the joint with the electrostatic chuck of the chuck-side terminal owing to a lateral force acted upon the top end from a planar error between the two terminals. <P>SOLUTION: A chuck-side terminal 31 is formed of a flexible electric wire 32 whose base terminal 34 is joined to the backside 4 of an electrostatic chuck 1a and an end point member 36 joined to the tip of the electric wire 32. No matter whether a lateral force is applied to the end point member 36 of the chuck-side terminal or no matter whether the end point member 36 gets deformed when joining the chuck-side terminal 31 to its mating terminal, since the root of the electric wire 32 is flexible and no force acts on the joint part of the root and the electrostatic chuck 1a, there occurs no break. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
