| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro-sensor excelling in sensitivity characteristics and in response characteristics. <P>SOLUTION: When reducing only the quality factor of a detection vibrator relating to the response characteristics of this vibration gyro-sensor with the quality factor left as it is of a driven vibrator relating to the sensitivity characteristics thereof, the response characteristics can be enhanced with the sensitivity characteristics maintained. Methods are suitable such as: (1) The resistance value of an electrode of the detection vibrator is made larger than that of an electrode of the driven vibrator; (2) The resistance value of an electrode material for forming an electrode of the detection vibrator is made larger than that of an electrode material forming an electrode of the driven vibrator; and (3) A conductive metal oxide is selected as an electrode material for forming an electrode of the detection vibrator while a metallic material is selected as an electrode material for forming an electrode of the driven vibrator. <P>COPYRIGHT: (C)2009,JPO&INPIT |
