| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating body that suppresses a temperature rise in a discharge space at the central part. <P>SOLUTION: The plasma generating body has a plurality of dielectrics 3 arrayed in one direction, and each conductor 5 arranged in the inside of each dielectric 3 so as to generate plasma in a discharge space between the dielectrics 3 by applying a voltage between the conductors 5. The plasma generating body is configured to have four or more dielectrics 3. A facing area between the conductors 5 facing each other across a discharge space at the central part in the array direction of the dielectrics 3 is smaller than that between the conductors 5 facing each other across a discharge space at the end part in the array direction of the dielectrics 3. <P>COPYRIGHT: (C)2009,JPO&INPIT |
