发明名称 LOBE COATING METHOD AND THE LOBE OF TEFLON
摘要 The present invention relates to a method for coating Teflon on a lobe as a basic material of a dry pump for removing a harmful substance. More specifically, the method comprises: an inspection step of checking the state of a lobe which is a basic material; a degreasing step of removing impurities from a surface to be coated; a sanding step of sanding a coated face; a surface processing step of removing a protrusion portion by using sand paper and then performing air cleaning on the surface; a primary coating step of coating Teflon on the surface; a primary firing step of performing a heat treatment on the coated surface by using a dry furnace; a secondary coating step of coating Teflon on the surface to be a uniform thickness; a cooling step of slowly cooling the coated surface in the dry furnace for the heat treatment; and an inspection step of confirming a coated state and a thickness tolerance. Accordingly, provided are the method for coating Teflon on a lobe of a dry pump for removing a harmful substance to reduce a cost according to replacement by reducing abrasion of the lobe, and a product produced thereby.
申请公布号 KR20160019143(A) 申请公布日期 2016.02.19
申请号 KR20140103139 申请日期 2014.08.11
申请人 SST CO., LTD. 发明人 KIM, DAE KI
分类号 H01L21/02;B05D3/00;B05D7/24;H01L21/56 主分类号 H01L21/02
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