GASKET

摘要

The purpose of the present invention is not only to improve a gasket obtained by a polymer firing method so as to achieve excellent vacuum sealing characteristics but also to improve heat resistance and pressure resistance, which have been problems of conventional graphite gaskets. The present invention is a gasket which is formed from a graphite film that has a thickness of 0.5 μm or more but less than 15 μm and an in-plane electrical conductivity of 20,000 S/cm or more. It is preferable that the graphite film has a specific gravity of 2.05 or more but less than 2.26. A graphite gasket according to the present invention is able to be obtained by subjecting a polymer film to a heat treatment at a temperature of 2,800°C or more under pressure.