| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and device for properly inspecting a bending state over a wide range.SOLUTION: An inspection device 10 comprises a camera 34, a control unit 36, and a line lattice 50. A mirror surface body 20 curves in a first direction. The line lattice 50 includes lattices 50a arranged in the first direction, which is illuminated from the backside thereof by a light source 32. The camera 34 is placed at a position where illumination light having passed through the line lattice 50 from the light source 32 is regularly reflected on the mirror surface body 20 and performs imaging while focusing on the line lattice 50 through the mirror surface body 20 to acquire an inspection image 70 in which the line lattice 50 is imaged in at least a part of the mirror surface body 20. The control unit 36 sets a plurality of regions in the first direction with respect to the inspection image 70, measures an average pitch of the lattices 50a in each region and determines whether or not the measured average pitch falls within a proper range, so as to inspect whether or not a bending state of the mirror surface body 20 is proper.SELECTED DRAWING: Figure 3 |
