| 摘要 |
<p>A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12). The surface texture measuring instrument further includes: a scanning controller (54) that collects a detection signal from the force sensor (1) and drives the actuator such that the detecting signal coincides with a target measurement value; a touch signal generator (51) that generates a touch signal when the detection signal from the force sensor (1) coincides with the target measurement value; and a measurement value collecting unit (55) that collects a measurement value from a counter (26) at a predetermined time interval in a state where a fluctuation range of the detection signal from the force sensor (1) is within a preset range when a scanning controller is in operation, the latch counter (52) collecting a measurement value from a latch counter (52) each time the touch signal is generated in a state where the detection signal from the force sensor (1) oscillates and an amplitude exceeds the preset range.</p> |
