| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing device capable of preventing contact of a member to be borne with a static pressure gas bearing in a level that causes seizure, and to provide a limit load detector used therefor. SOLUTION: This static pressure gas bearing device 1 is provided with a conductive porous static pressure gas bearing 7 for supporting a rotary shaft 2 by gas pressure in a bearing gap 4 based on high pressure gas injected toward a face 3 to be borne from a bearing face 5 forming the bearing gap 4 in cooperation with the face 3 to be borne of the rotary shaft 2; the limit load detector 8 connected electrically to the rotary shaft 2 and the porous static pressure gas bearing 7, and for detecting an effect that an applied load applied from the rotary shaft 2 to the porous static pressure gas bearing 7 reaches a limit based on electric contact between the rotary shaft 2 and the porous static pressure gas bearing 7 in the bearing gap 4; a driving means 9 for rotation-driving the rotary shaft 2; and a drive control means 10 for controlling the rotation drive of the rotary shaft 2 by the driving means 9, based on the detection by the limit load detector 8. COPYRIGHT: (C)2010,JPO&INPIT |
