LASER CRYSTALLZIATION SYSTEM AND METHOD OF CONTROLLING CRYSTALLIZATION ENERGY THEREIN

摘要

A laser crystallization system and a method of controlling crystallization energy therein are disclosed. The laser crystallization system comprises: a Mura monitor device, used for monitoring the real-time Mura status during the crystallization process; a host station, connected with the Mura monitor device, used for determining the real-time level of the real-time Mura status acquiring from the Mura monitoring device, and generating crystallization energy control order based on the real time level; a crystallization device, connected with the host station, for carrying out the crystallization energy control order generated from the host station to control the outputting crystallization energy. The Mura monitoring device is used to monitor the Mura status online in real-time, and the crystallization energy outputted by the crystallization device is controlled according to the real-time Mura status. The present invention can achieve the effective monitoring of the Mura status of the product, further to control the corresponding crystallization energy. Comparing with the artificial way, the instant embodiment enhances the working efficiency, and is able to ensure the accuracy and control online to ensure the product yield.

主权项

1. A laser crystallization system, wherein the laser crystallization system comprises:
a Mura monitoring device for monitoring real-time Mura status in a crystallization process, the Mura monitoring device includes an excimer laser annealing device, a source generating device and an image receiver, wherein the excimer laser annealing device generates an excimer laser and illustrates a substrate by linear scanning to transform a crystalline state of a silicon thin film from an amorphous silicon structure into a polysilicon structure; a host station, connected with the Mura monitoring device, for determining a real time level acquired from the Mura monitoring device, and generating crystallization energy control order based on the real time level; a crystallization device, connected with the host station, for carrying out the crystallization energy control order generated from the host station to control the outputting crystallization energy.