GAS-DISCHARGE LASER POWER AND ENERGY CONTROL

摘要

The present disclosure is directed to simultaneously controlling peak pulse power and pulse energy in gas-discharge lasers. In an aspect, a radio-frequency power supply (104) that is coupled to a gas-discharge laser (102) is turned ON to initiate delivery of a laser pulse. The radio-frequency power supply is modulated ON/OFF to maintain the amplitude of the laser pulse at about a desired or prescribed value. Further, the radio-frequency power supply is turned OFF to terminate delivery of the laser pulse when the accumulated energy reaches reached a predefined energy threshold value.