THINNER COMPOSITIONS AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME

摘要

A thinner composition contains: on the basis of the total weight of the composition, 30-70 wt% of an acetate-based compound; 1-20 wt% of a lactate-based compound; 30-60 wt% of a propionate-based compound; and 10-500 ppm of an ether-based additive. The thinner composition has excellent EBR characteristics and RRC characteristics with respect to a photoresist material.