Chemical Circulation System and Methods of Cleaning Chemicals

摘要

A method includes passing a chemical solution through a metal-ion absorber, wherein metal ions in the metal-ion absorber are trapped by the metal-ion absorber. The chemical solution exiting out of the metal-ion absorber is then used to etch a metal-containing region, wherein the metal-containing region includes a metal that is of a same element type as the metal ions.

主权项

1. A method comprising:
using a wet-clean circulation system to form an integrated circuit, the wet-clean circulation system comprising:
a storage;a filter connected to the storage;a metal ion absorber connected to the filter; anda monitor connected to the metal ion absorber; and a process chamber, wherein the storage, the filter, the metal ion absorber, the monitor, and the process chamber are connected in series to allow a chemical solution to circulate in the wet-clean circulation system.