OPTICAL SEMICONDUCTOR ELEMENT, MANUFACTURING METHOD OF OPTICAL SEMICONDUCTOR ELEMENT, AND INSPECTION METHOD OF OPTICAL SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an optical semiconductor element capable of suppressing dissolution and vaporization of resin, a manufacturing method of the optical semiconductor element, and an inspection method of an optical semiconductor element.SOLUTION: An optical semiconductor element is formed on a substrate, is defined as a side surface and an upper surface, and includes a waveguide having an end surface, and resin with which the waveguide is filled on the substrate. In the optical semiconductor element, a non-resin region where the resin is not provided on the side surface and upper surface of the waveguide extends from the end surface to the extension direction of the waveguide over a predetermined distance.SELECTED DRAWING: Figure 3