发明名称 保管設備
摘要 A storage facility includes a controller for monitoring a supply state of the inactive gas for the plurality of storage sections and for controlling the plurality of supply amount adjusting devices. The controller is configured to monitor the supply state of the inactive gas for the plurality of storage sections by dividing the plurality of storage sections into a plurality of monitoring areas, and to control a plurality of supply amount adjusting devices such that the supply state of the inactive gas supplied to the storage sections belonging to each of the plurality of monitoring areas satisfies a set restricting condition defined in advance.
申请公布号 JP5884780(B2) 申请公布日期 2016.03.15
申请号 JP20130134269 申请日期 2013.06.26
申请人 株式会社ダイフク 发明人 高原 正裕;上田 俊人
分类号 B65G1/00;H01L21/673 主分类号 B65G1/00
代理机构 代理人
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