| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for peeling metallic thin films from glass substrates by which metallic thin films on a large quantity of glass substrates can continuously be peeled to such an extent that the thin film-peeled glass substrates can be reproduced for flat display panels. SOLUTION: An electrolytic solution of a sodium nitrate aqueous solution is continuously fed onto a glass substrate fed onto a carrier path 25. Further, the glass substrate passes through: an elution part 2 for eluting a chromium metal thin film on the glass substrate G by energizing; a washing part 4 for removing the eluted metal by a shower; polishing parts 6 and 8 for polishing uneluted metal; medium pressure shower parts 10 and 12 for removing abrasive powder; and a drying part 14 for drying the surface of the glass substrate with air, and is thereafter carried away from the carrier path 25 so as to be subjected to a series of peeling operations. COPYRIGHT: (C)2005,JPO&NCIPI
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