| 摘要 |
Disclosed herein is a non-contact substrate transfer turner capable of performing a transfer and a turn-over of a substrate in a non-contact state. The non-contact substrate transfer turner includes a transfer member moving along a guide rail; a substrate supporting member installed at the transfer member and non-contact supporting a substrate by drag force and lift force; and a power transmitting member providing power to the substrate supporting member to rotate the substrate supporting member. |
