| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device and an inspection method of the semiconductor device which can prevent a needle deviation happening in the case of probing. SOLUTION: A groove 2 for inserting an inspection probe is formed in an electrode 1. The groove 2 consists of a base and sides. The width dimension of a base 3 becomes gradually small toward a peak 10. When inspecting, the inspection probe is inserted into the groove 2. Then, the inspection probe is guided towards a side with a small width dimension of the base 3. Then, two parts of the inspection probe contact the sides of the groove. Consequently, the sliding of the probe is controlled at the time of inspection. COPYRIGHT: (C)2007,JPO&INPIT
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