| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope which can contribute greatly to making efficient cause investigation of a discovered pattern irregularity. SOLUTION: The electron microscope is provided with an I/O209f for taking in an image data of a microscopic image acquired from another electron microscope and a computing unit 209a to create a display signal based on the microscopic image acquired from the other electron microscope and the image data of the microscopic image acquired by itself in order to display an microscopic image acquired by itself and a microscopic image acquired from the other electron microscope through the I/O209f in a same scale and in a same display mode, and a display device 110 to display the above two microscopic images based on the display signal from the above computing part 209a. COPYRIGHT: (C)2007,JPO&INPIT
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