发明名称 ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a microscope capable of efficiently correcting image distortion caused by a scanning error or the like. SOLUTION: A preliminarily obtained standard image is divided into regions each having a width of two or more pixels in the scanning direction. Next, a scanning image is divided into regions corresponding to the respective regions obtained by dividing the standard image, and an image of each region of the scanning image is reduced to be set equal to the image of each region of the standard image. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007220529(A) 申请公布日期 2007.08.30
申请号 JP20060040956 申请日期 2006.02.17
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 NAGAOKI ISAO;NAKAYAMA YOSHIHIKO;ISHII RYOICHI;KIMURA MASASHI;SUZUKI HIROMASA
分类号 H01J37/22 主分类号 H01J37/22
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