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发明名称
Wafer inspection using short-pulsed continuous broadband illumination
摘要
申请公布号
EP1860428(A3)
申请公布日期
2007.12.12
申请号
EP20070252110
申请日期
2007.05.23
申请人
NEGEVTECH LTD.
发明人
FURMAN, DOV;SILBERSTEIN,SHAI
分类号
G01N21/956;H01L21/66
主分类号
G01N21/956
代理机构
代理人
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