发明名称 ION IMPLANTATION FOR SUPERCONDUCTOR TAPE FABRICATION
摘要 A method of forming a superconductor tape, includes depositing a superconductor layer on a substrate, forming a metal layer comprising a first metal on a surface of the superconductor layer, and implanting an alloy species into the metal layer where the first metal forms a metal alloy after the implanting the alloy species.
申请公布号 US2016160344(A1) 申请公布日期 2016.06.09
申请号 US201314091510 申请日期 2013.11.27
申请人 Varian Semiconductor Equipment Associates, Inc. 发明人 Wang Connie P.;Murphy Paul;Sullivan Paul;Godet Ludovic;Sinclair Frank;Evans Morgan
分类号 C23C14/48;C23C14/58;C23C14/02;H01B13/00;H01B12/02 主分类号 C23C14/48
代理机构 代理人
主权项 1. A method of forming a superconductor tape, comprising: depositing a superconductor layer on a substrate; forming a metal layer comprising a first metal on a surface of the superconductor layer; and implanting an alloy species into the metal layer, wherein the first metal forms a metal alloy after the implanting of the alloy species.
地址 Gloucester MA US