METHOD FOR FORMING PERPENDICULAR MAGNETIZATION TYPE MAGNETIC TUNNEL JUNCTION ELEMENT AND APPARATUS FOR PRODUCING PERPENDICULAR MAGNETIZATION TYPE MAGNETIC TUNNEL JUNCTION ELEMENT

摘要

Provided is a method for forming a perpendicular magnetization type magnetic tunnel junction element. This method comprises: a step for forming a tunnel barrier layer on a first magnetic layer of a body to be processed; a step for cooling the body to be processed, on which the tunnel barrier layer has been formed; and a step for forming a second magnetic layer on the tunnel barrier layer after the cooling step.