发明名称 電子デバイス
摘要 To provide an electronic device wherein generation of a positional shift between a cap and a substrate can be suppressed. This electronic device is characterized by being provided with: a substrate, which includes a substrate main body having a main surface, and a linear metal film provided on the main surface, said metal film having an annular shape surrounding a predetermined region; and a cap, which has an opening in a shape substantially matching the predetermined region, and which forms an enclosed space with the main surface by being bonded to the metal film at an outer end of the opening. The electronic device is also characterized in that: the outer end of the opening has, in a cross-section, a first portion positioned closest to the substrate, and a second portion positioned further than the first portion from the substrate; the metal film is overlapping the second portion; and the film thickness of a metal film portion overlapping the second portion increases in the predetermined direction toward the second portion from the first portion in the cross-section.
申请公布号 JP6028882(B2) 申请公布日期 2016.11.24
申请号 JP20160532645 申请日期 2015.07.31
申请人 株式会社村田製作所 发明人 池田 功;小西 純;古井 仁哉
分类号 H03H9/02;H01L23/02 主分类号 H03H9/02
代理机构 代理人
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