摘要 |
PROBLEM TO BE SOLVED: To provide a cooling vessel for manufacturing silicon, which is used for accommodating and cooling a silicon melt when polycrystalline silicon is manufactured from the silicon melt, and which enables easy exfoliation of the polycrystalline silicon after solidification and the manufacturing of the polycrystalline silicon in which contamination from the surface of a base material is extremely reduced. SOLUTION: The vessel for manufacturing silicon is used for accommodating and cooling the silicon melt when the polycrystalline silicon is manufactured from the silicon melt, and in the vessel, the face for accepting the silicon melt is constituted from tungsten. COPYRIGHT: (C)2005,JPO&NCIPI
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