Electron microscopy system and method

摘要

An electron microscopy system (1) and an electron microscopy method for detection of time dependencies of secondary electrons generated by primary electrons is provided, in which the primary electron pulses are directed onto a sample surface (9) and electrons emanating from the sample surface are detected, time resolved. To this end the system comprises in particular a cavity resonator (53, 5). A cavity resonator can also be used to reduce aberrations of focusing lenses.