发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a light-emitting device that comprises a thin-film transistor having good electric characteristics and a high reliability, with a high mass productivity.SOLUTION: Provided is a light-emitting device comprising a reverse stagger type thin-film transistor. In the reverse stagger type thin-film transistor, a gate insulating film is formed on a gate electrode. A microcrystal semiconductor film that functions as a channel formation region is formed on the gate insulating film. A buffer layer is formed on the microcrystal semiconductor film. A pair of a source region and a drain region is formed on the buffer layer. A pair of a source electrode and a drain electrode contacted with the source region and the drain region is formed so as to expose a part of the source region and drain region.SELECTED DRAWING: Figure 2
申请公布号 JP2016192561(A) 申请公布日期 2016.11.10
申请号 JP20160116901 申请日期 2016.06.13
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;SUZUKI YUKIE;KUWABARA HIDEAKI
分类号 H01L29/786;H01L21/205;H01L51/50;H05B33/14 主分类号 H01L29/786
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