发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a light-emitting device that comprises a thin-film transistor having good electric characteristics and a high reliability, with a high mass productivity.SOLUTION: Provided is a light-emitting device comprising a reverse stagger type thin-film transistor. In the reverse stagger type thin-film transistor, a gate insulating film is formed on a gate electrode. A microcrystal semiconductor film that functions as a channel formation region is formed on the gate insulating film. A buffer layer is formed on the microcrystal semiconductor film. A pair of a source region and a drain region is formed on the buffer layer. A pair of a source electrode and a drain electrode contacted with the source region and the drain region is formed so as to expose a part of the source region and drain region.SELECTED DRAWING: Figure 2 |
申请公布号 |
JP2016192561(A) |
申请公布日期 |
2016.11.10 |
申请号 |
JP20160116901 |
申请日期 |
2016.06.13 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;SUZUKI YUKIE;KUWABARA HIDEAKI |
分类号 |
H01L29/786;H01L21/205;H01L51/50;H05B33/14 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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