Method for forming thin film,申请号KR20010069597-传众专利搜索

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发明名称	Method for forming thin film
摘要
申请公布号	KR100760291(B1)	申请公布日期	2007.09.19
申请号	KR20010069597	申请日期	2001.11.08
申请人		发明人
分类号	C23C16/44;H01L21/205;C23C16/455;C23C16/515;H01L21/285;H01L21/316	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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