发明名称 分光測定方法、散乱型近接場顕微鏡、及びチップ増強ラマンプローブの製造方法
摘要 PROBLEM TO BE SOLVED: To provide a spectrometry and a scattering type near field optical microscope which have a high enhancement degree, and a manufacturing method for a tip-enhanced raman probe with a high enhancement degree.SOLUTION: A manufacturing method for a tip-enhanced raman probe includes the step of: preparing a silicon probe; oxidizing the probe; and forming a metal film on the oxidized probe. In the step of oxidizing the probe, the silicon is oxidized until getting a thickness where a plasmon resonance wavelength of the probe on which the metal film is formed and a wavelength of a pump laser become equal.
申请公布号 JP5716196(B2) 申请公布日期 2015.05.13
申请号 JP20120281268 申请日期 2012.12.25
申请人 ナノフォトン株式会社 发明人 田口 敦清;早澤 紀彦;齊藤 結花;河田 聡
分类号 G01Q60/22;G01N21/65;G01Q60/18 主分类号 G01Q60/22
代理机构 代理人
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