| 摘要 |
A sputter unit (2) is introduced comprising a housing (20), a gas inlet, an interface (2-3) for removable connecting the sputter unit (2) to a vacuum chamber (3), a gas outlet arranged for supplying a process gas received via the gas inlet to the vacuum chamber (3), an interface (2-1) for removable connecting the sputter unit (2) to a base unit (1) comprising a vacuum pump (122) for generating a vacuum in the vacuum chamber (3), and a transformer arranged in the housing (20) for increasing a supply voltage into an ionisation voltage for ionising the process gas supplied via the gas outlet to the vacuum chamber (3). |
