METHOD OF INSPECTING SUBSTRATE FOR DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide stable contact even when a transparent conductive film is an IZO film. SOLUTION: In this inspection method, a needle tip of a probe provided with the sharp needle tip having a hardness of a range over from HV500 to HV100 is pressed onto an electrode of a substrate for display to bring contact face pressure between the electrode and the needle tip into 0.04-0.06 g/μm2. COPYRIGHT: (C)2007,JPO&INPIT