| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of easily generating electric discharge between electrodes at the time of applying high voltage under reduced pressure due to a gap between the electrodes in the case of bipolar electrodes in post fire type electrostatic chuck, and the problem of exposure of the electrode film side surface to the external atmosphere due to generation of a gap corresponding to the electrode film thickness on the side surface of two ceramic plates sandwiching the electrodes. SOLUTION: An electrostatic chuck has a bipolar internal electrode film disposed between two ceramic insulating layers with the two insulating layers bonded by the internal electrode film. The internal electrode film is embedded in an electrode groove formed in either one of the surfaces bonded to the two insulating layers of the internal electrode film. The end face of a rib formed between the electrode grooves is bonded by forming a rib groove on the side facing the rib, and inserting to the electric insulating bonding material filling the rib groove. COPYRIGHT: (C)2008,JPO&INPIT |
